Title: A Users Guide to Vacuum Technology
Author: John F. O'Hanlon, Timothy A. Gessert
Press: Wiley-Blackwell
EISBN: 9781394174140
PISBN: 9781394174133
Edition: 4th
Introduction: Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind.
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Institute: ZJUI
Major: Electronic Information
Course ID: /
Course Title: The Vacuum Engineering in the Semiconductor Industry