Title: A Users Guide to Vacuum Technology
Author: Munson, Okiishi, Huebsch and Rothmayer
Press: WILEY
ISBN: 9781394174133
Edition: 4th
Introduction: Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind.
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Institute: ZJUI
Major: EE/ ECE/ CE/ ME
Course ID: ME 498VS
Course Title: Vacuum Engineering for Semicon