Teacher Information
- Name
- HU Huan ZJU Faculty Homepage
- Department
- ZJUI
- Research
-
Advanced Nanomanufacturing，Bio-inspired micro/nano sensors，Lab on a chip integrating Nanotechnology
- Document Type
- Book Chapter
Publication
- Chapter Title
-
Tip-based Nanofabrication for NEMS Devices
- Author
- Chapter
-
1
- Source Title
-
Advanced MEMS/NEMS Fabrication and Sensors
- Author/Author of Source
- Publisher
-
Springer
- P-ISBN
-
9783030797485
- E-ISBN
-
978-3-030-79749-2
- Abstract
-
Nano-electro-mechanical systems (NEMS) have been extensively studied and widely used in a variety of fields, for its ultrasensitive performance and enabling cutting-edge researches at this minuscule scale. However, existing nanofabrication still suffers from high cost or the difficulty of scaling up. This chapter gives an overview of currently widely employed nanofabrication techniques and then highlights one promising nanofabrication method based on scanning probes—tip-based nanofabrication (TBN). Finally, we conclude on the three major trends of current TBN technology development.
- DOI
- https://doi.org/10.1007/978-3-030-79749-2_1
Print & Electronic Holdings
- Holdings
-
International Campus Library-Special Collection
- Call Number
-
TN4/LA5/SC2
- Barcode
- Database
-
Springer
- Link