Title: A Users Guide to Vacuum Technology
Author: John F. O'Hanlon;Timothy A. Gessert
Press: Wiley-Blackwell.
ISBN: 9781394174133
Edition: 4th
Introduction: For decades, A User’s Guide to Vacuum Technology has met this need, with a user-focused introduction to vacuum technology as it is incorporated into semiconductor, optics, solar sell, and other engineering processes. With an emphasis on otherwise neglected subjects and on accessibility to the secondary user of vacuum technology, it balances treatment of older systems that are still in use with a survey of the latest cutting-edge technologies. The result promises to continue as the essential guide to vacuum systems.
Digital Access
Full-text Availability: iResearch
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Physical Copy Information
Location: International Campus Library - Textbook Shelf
Call Number: TB7/LO1-4/ZJUI
Major: ME
Course ID: ME 498VS
Course Title: Vacuum Engineering in Semiconductor Industry